Publications

Found 1 results
Author Title [ Type(Desc)] Year
Filters: Author is Ruiz, V  [Clear All Filters]
Conference Paper
Ruiz, V. et al. Characterization of the first in-plane mode of AlN-actuated microcantilevers. SPIE Microtechnologies 80661G–80661G (International Society for Optics and Photonics, 2011).