Found 5 resultsAuthor [ Title] Type Year
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Capacitive micromachined ultrasonic transducers for chemical detection in nitrogen. Applied Physics Letters 91, 094102 (2007).
A chemical sensor based on a microfabricated cantilever array with simultaneous resonance-frequency and bending readout. Sensors and Actuators B: Chemical 77, 122–131 (2001).
A chemical sensor based on a micromechanical cantilever array for the identification of gases and vapors. Applied Physics A: Materials Science & Processing 66, S61–S64 (1998).
Micro Total Analysis Systems’ 9 57–60 (Springer Netherlands, 1998).
The nanomechanical NOSE. Micro Electro Mechanical Systems, 1999. MEMS'99. Twelfth IEEE International Conference on 9–13 (IEEE, 1999).