DETERMINATION OF THE ENERGIES OF IMPURITY IONS IN A LOW-PRESSURE PLASMA USING PLASMA CHEMICAL ETCHING
DETERMINATION OF THE ENERGIES OF IMPURITY IONS IN A LOW-PRESSURE PLASMA USING PLASMA CHEMICAL ETCHING. HELVETICA PHYSICA ACTA 56, 959–960 (BIRKHAUSER VERLAG AG PO BOX 133 KLOSTERBERG 23, CH-4010 BASEL, SWITZERLAND, 1983).