Publications

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6
Khuri-Yakub, B. T. et al. 6D-1 The Capacitive Micromachined Ultrasonic Transducer (CMUT) as a Chem/Bio Sensor. Ultrasonics Symposium, 2007. IEEE 472–475 (IEEE, 2007).
C
Park, K. K. et al. Capacitive micromachined ultrasonic transducers for chemical detection in nitrogen. Applied Physics Letters 91, 094102 (2007).